Enhanced etching processes using remote plasma sources

ABSTRACT

Methods of etching a patterned substrate may include flowing an oxygen-containing precursor into a first remote plasma region fluidly coupled with a substrate processing region. The oxygen-containing precursor may be flowed into the region while forming a plasma in the first remote plasma region to produce oxygen-containing plasma effluents. The methods may also include flowing a fluorine-containing precursor into a second remote plasma region fluidly coupled with the substrate processing region while forming a plasma in the second remote plasma region to produce fluorine-containing plasma effluents. The methods may include flowing the oxygen-containing plasma effluents and fluorine-containing plasma effluents into the processing region, and using the effluents to etch a patterned substrate housed in the substrate processing region.

RELATED APPLICATIONS

This Application is a continuation of, and claims benefit to, U.S. patent application Ser. No. 14/186,059, filed Feb. 21, 2014, which claims the benefit of U.S. Provisional Application No. 61/771,264, filed Mar. 1, 2013, and titled “Enhanced Etching Processes Using Remote Plasma Sources.” The entire disclosure of these applications is hereby incorporated by reference for all purposes.

TECHNICAL FIELD

The present technology relates to semiconductor processes and equipment. More specifically, the present technology relates to etching process chemistries and systems for improved material removal.

BACKGROUND

Integrated circuits are made possible by processes which produce intricately patterned material layers on substrate surfaces. Producing patterned material on a substrate requires controlled methods for removal of exposed material. Chemical etching is used for a variety of purposes including transferring a pattern in photoresist into underlying layers, thinning layers, or thinning lateral dimensions of features already present on the surface. Often it is sought to have an etch process that etches one material faster than another facilitating, for example, a pattern transfer process. Such an etch process is said to be selective to the first material. As a result of the diversity of materials, circuits, and processes, etch processes have been developed with a selectivity towards a variety of materials.

A wet HF etch preferentially removes silicon oxide over other dielectrics and semiconductors. However, wet processes are unable to penetrate some constrained trenches and sometimes deform the remaining material. Dry etches produced in local plasmas formed within the substrate processing region can penetrate more constrained trenches and exhibit less deformation of delicate remaining structures. However, local plasmas can damage the substrate through the production of electric arcs as they discharge.

Thus, there is a need for improved methods and systems for selectively etching materials and structures on semiconductor substrates. These and other needs are addressed by the present technology.

SUMMARY

Methods of etching a patterned substrate may include flowing an oxygen-containing precursor into a first remote plasma region fluidly coupled with a substrate processing region. The oxygen-containing precursor may be flowed into the region while forming a plasma in the first remote plasma region to produce oxygen-containing plasma effluents. The methods may also include flowing a fluorine-containing precursor into a second remote plasma region fluidly coupled with the substrate processing region while forming a plasma in the second remote plasma region to produce fluorine-containing plasma effluents. The methods may include flowing the oxygen-containing plasma effluents and fluorine-containing plasma effluents into the processing region, and using the effluents to etch a patterned substrate housed in the substrate processing region.

At least one additional precursor may also be flowed with one or both of the oxygen-containing precursor or the fluorine-containing precursor, and the additional precursor may be selected from the group consisting of helium, argon, nitrogen, and molecular hydrogen (H₂). The fluorine-containing precursor may be selected from the group consisting of atomic fluorine, diatomic fluorine, nitrogen trifluoride, carbon tetrafluoride, hydrogen fluoride, and xenon difluoride. The fluorine-containing precursor may be nitrogen trifluoride in embodiments, and the fluorine-containing plasma effluents may include NF* and NF₂* species. The fluorine-containing plasma effluents may also consist essentially of NF* and NF₂* species in embodiments. The oxygen-containing precursor may include a precursor selected from the group consisting of molecular oxygen, ozone, nitrous oxide, nitric oxide, and nitrogen dioxide.

The first remote plasma region may be a remote plasma unit separate from and fluidly coupled with the substrate processing chamber. The second remote plasma region may be configured to produce a capacitively-coupled plasma located within the processing chamber and fluidly coupled with the processing region. The plasma in the second remote plasma region may be operated at a power level of less than or about 500 Watts, and may be operated at a power level of less than or about 200 Watts in embodiments. The substrate processing region may be plasma-free during the etching process. The fluorine-containing precursor may bypass the first plasma region in disclosed embodiments. The methods may also include maintaining the substrate temperature at or below about 100° C. during the etch process, and may include maintaining the substrate temperatures at or below about 50° C. during the etch process.

Methods of etching a patterned substrate may also include flowing an oxygen-containing precursor into a first remote plasma region fluidly coupled with a second remote plasma region of a substrate processing chamber while forming a plasma in the first remote plasma region to produce oxygen-containing plasma effluents. The methods may include delivering the oxygen-containing plasma effluents into the second remote plasma region. The methods may also include flowing a fluorine-containing precursor into the second remote plasma region while forming a plasma in the second remote plasma region to produce fluorine-containing plasma effluents. The second remote plasma region may be fluidly coupled with a substrate processing region of the processing chamber. The methods may further include delivering the oxygen-containing plasma effluents and fluorine-containing plasma effluents into the substrate processing region, and etching a patterned substrate housed in the substrate processing region with the oxygen-containing and fluorine-containing plasma effluents.

The fluorine-containing precursor may bypass the first plasma region in the methods, and the first remote plasma region may be a remote plasma unit separate from and fluidly coupled with the substrate processing chamber. The plasma in the second remote plasma region may be a capacitively-coupled plasma formed between electrodes within the processing chamber. The plasma in the second remote plasma region may be operated at a power level of less than or about 200 Watts in disclosed embodiments. The methods may further include operating the first remote plasma region at a first plasma power, and operating the second remote plasma region at a second plasma power. The first plasma power and second plasma power may be different from one another in embodiments.

Methods of etching a patterned substrate may also include flowing an oxygen-containing precursor into a first remote plasma region fluidly coupled with a second remote plasma region of a substrate processing chamber while forming a plasma in the first remote plasma region to produce oxygen-containing plasma effluents. The methods may include delivering the oxygen-containing plasma effluents into the second remote plasma region. The methods may also include flowing nitrogen trifluoride into the second remote plasma region through an inlet that bypasses the first remote plasma region while forming a capacitively-coupled plasma in the second remote plasma region at a power level of less than or about 200 Watts to produce NF* and NF₂* plasma effluents. The second remote plasma region may be fluidly coupled with a substrate processing region of the processing chamber. The methods may further include delivering the oxygen-containing plasma effluents and the NF* and NF₂* plasma effluents into the substrate processing region, and etching a patterned substrate housed in the substrate processing region with the plasma effluents. The substrate processing region may be substantially plasma-free during the etching, and the patterned substrate may have exposed regions of silicon oxide and silicon nitride.

Such technology may provide numerous benefits over conventional techniques. For example, improved selectivity may be achieved based on more tunable plasma profiles. Additionally, lower operating powers may improve chamber component protection and degradation. These and other embodiments, along with many of their advantages and features, are described in more detail in conjunction with the below description and attached figures.

BRIEF DESCRIPTION OF THE DRAWINGS

A further understanding of the nature and advantages of the disclosed technology may be realized by reference to the remaining portions of the specification and the drawings.

FIG. 1 shows a flow chart of operations of an etch process according to embodiments of the disclosed technology.

FIG. 2 shows another flow chart of operations of an etch process according to embodiments of the disclosed technology.

FIG. 3A shows a schematic cross-sectional view of a substrate processing system according to embodiments of the disclosed technology.

FIG. 3B shows a schematic cross-sectional view of a portion of a substrate processing chamber according to embodiments of the disclosed technology.

FIG. 3C shows another schematic cross-sectional view of a portion of a substrate processing chamber according to embodiments of the disclosed technology.

FIG. 3D shows another schematic cross-sectional view of a portion of a substrate processing chamber according to embodiments of the disclosed technology.

FIG. 3E shows a bottom plan view of a showerhead according to embodiments of the disclosed technology.

FIG. 4 shows a top plan view of an exemplary substrate processing system according to embodiments of the disclosed technology.

In the appended figures, similar components and/or features may have the same numerical reference label. Further, various components of the same type may be distinguished by following the reference label by a letter that distinguishes among the similar components and/or features. If only the first numerical reference label is used in the specification, the description is applicable to any one of the similar components and/or features having the same first numerical reference label irrespective of the letter suffix.

DETAILED DESCRIPTION

The present technology includes improved processes and chemistry profiles for selectively etching materials on patterned semiconductor substrates with respect to other materials. While conventional processes may discuss etch processes, the presently described configurations utilize multiple plasma configurations to separately excite precursors. The described technology may advantageously minimize recombination of plasma species by providing shorter flow pathways for select precursors. Additionally, the technology may allow improved plasma profiles by utilizing multiple methods of exciting one or more precursors used in the etching operations.

The methods may also beneficially reduce the number of species being flowed through remote plasma units coupled with a processing chamber. For example, precursor fluids for etching may often include fluorine-containing precursors, and oxygen and/or nitrogen-containing precursors. The plasma cavity of the remote plasma system, as well as the distribution components to the processing chamber, may be coated or lined to provide protection from the reactive radicals. However, if both radical species are produced inside the remote plasma unit, the produced plasma effluents may interact differently with the coatings or linings of the unit. Accordingly, the unit may be degraded over time by the precursors. In the present technology, however, a single precursor may be flowed through the remote plasma unit, and thus the unit may be designed or coated specifically to protect against degradation from effluents of the individual precursors.

The technology also surprisingly shows the advantage that by providing the precursor species through separate remote plasma systems, the specific dissociation and plasma characteristics of each fluid can be tailored to provide improved etching performance. Additionally, by utilizing a reduced power capacitively-coupled plasma (CCP) within the chamber, chamber degradation can be reduced, which provides improved process performance with less particulate contamination. Accordingly, the systems described herein provide improved flexibility in terms of chemistry modulation, while also providing improved etching performance. These and other benefits will be described in further detail below.

In order to better understand and appreciate the technology, reference is now made to FIG. 1, which shows a flow chart of a method 100 of an etching process according to embodiments. Prior to the first operation, a substrate may be patterned leaving exposed regions of silicon, silicon oxide, silicon nitride, as well as other oxides, nitrides, metals including tungsten, copper, titanium, tantalum etc., or other components. Silicon may be amorphous, crystalline, or polycrystalline, in which case it is usually referred to as polysilicon. Previous deposition and formation processes may or may not have been performed in the same chamber. If performed in a different chamber, the substrate may be transferred into the processing chamber for the etch process. Various front end processing may have been performed including the formation of gates, vias, and other structures. The patterned substrate may then be delivered to a substrate processing region of the processing chamber.

In embodiments, the substrate may already be located in the processing region if a previous operation was performed in the same chamber in which the etch process is to occur. An oxygen-containing precursor may be flowed into a first remote plasma region fluidly coupled with the substrate processing region at operation 110, while a plasma is formed in the first remote plasma region to produce oxygen-containing plasma effluents. The oxygen-containing precursor may include a variety of oxygen compounds, and may include one of more precursors such as molecular oxygen, ozone, nitrous oxide (N₂O), nitric oxide (NO), nitrogen dioxide (NO₂), among other oxygen-containing precursors. The precursor may be dissociated in the plasma to produce a variety of plasma effluents that may include O*, NO*, and other species useful in etching operations.

A fluorine-containing precursor may be flowed into a second remote plasma region that is separate from, but fluidly coupled with, the processing region at operation 120. A plasma may be formed in the second remote plasma region during the precursor delivery, and the plasma may be used to produce fluorine-containing plasma effluents. Several sources of fluorine may be used in the process, and in general, a fluorine-containing precursor may be flowed into the second remote plasma region that includes at least one precursor selected from the group consisting of atomic fluorine, diatomic fluorine, nitrogen trifluoride, carbon tetrafluoride, hydrogen fluoride, and xenon difluoride. The fluorine-containing precursor may include nitrogen trifluoride, and the fluorine-containing plasma effluents that are produced may include NF* and NF₂* species. As will be explained further below, the plasma created in the second remote plasma region may be specifically configured to excite the fluorine-containing precursor in such a way as to limit radical fluorine species or F* species such that the fluorine-containing plasma effluents consist essentially of NF* and NF₂* species.

Either or both of the first and second remote plasma regions may be referred to as a remote plasma region herein and may be within a distinct module from the processing chamber, or as a compartment or defined area within the processing chamber. A plasma may be formed within the remote plasma region to generate plasma effluents from the oxygen-containing and fluorine-containing precursors. At operation 130, the oxygen-containing plasma effluents and the fluorine-containing plasma effluents may be flowed into the processing region of the chamber. The patterned substrate may be selectively etched with the combination of oxygen-containing and fluorine-containing plasma effluents at operation 140 so that exposed materials on the substrate may be etched.

After the etching has been performed, the reactive chemical species may be removed from the substrate processing region, and then the substrate may be removed from the processing region. When performed in substantially this fashion, the methods may allow a region of silicon nitride to be etched at a faster rate than a region of silicon or silicon oxide. Using the gas phase dry etch processes described herein, established etch selectivities of over 2:1 with regard to the silicon nitride etch rate as compared to the etch rate of other materials such as silicon and/or silicon oxide are possible. The silicon nitride etch rate may exceed the silicon and/or silicon oxide etch rate by a multiplicative factor of up to or about 5 or more, about 10 or more, about 15 or more, about 20 or more, about 50 or more, about 75 or more, about 100 or more, etc. or greater in embodiments of the technology.

The gas flow ratios of the precursors may include a variety of flow ratios such as atomic flow ratios (O:F) less than, greater than, or about 1:1000, 1:500, 1:250, 1:100, 1:50, 1:25, 1:15, 1:10, 1:5, 1:1, 5:1, 10:1 15:1, 25:1, 50:1, 100:1, 250:1, 500:1, 1000:1, etc. One or more additional precursors may be delivered with either or both of the oxygen-containing and/or fluorine containing precursors. The additional precursors may include relatively inert gases and may be one or more precursors selected from the group consisting of helium, argon, nitrogen, and molecular hydrogen (H₂). The inert gas can be used to improve plasma stability and/or to carry liquid precursors to the remote plasma region.

Flow rates and ratios of the different gases may be used to control etch rates and etch selectivity. In embodiments, the fluorine-containing precursor may include NF₃ at a flow rate of between about 1 sccm (standard cubic centimeters per minute) and 5,000 sccm. The oxygen-containing precursor may be included at a flow rate of between about 1 sccm and 5,000 sccm, and one or more carrier gases at a flow rate of between about 0 sccm and 3000 sccm, may be included with either precursor stream. The atomic flow rates or ratio of O:F may be kept high in embodiments to reduce or eliminate solid residue formation on the substrate materials such as oxide. The formation of solid residue may consume some silicon oxide which may reduce the silicon selectivity of the etch process.

An ion suppressor may be used to filter ions from the plasma effluents during transit from the remote plasma regions to the substrate processing region in embodiments of the technology. The ion suppressor functions to reduce or eliminate ionically charged species traveling from the plasma generation region to the substrate. Uncharged neutral and radical species may pass through the openings in the ion suppressor to react at the substrate. It should be noted that complete elimination of ionically charged species in the reaction region surrounding the substrate is not always the desired goal. In many instances, ionic species are required to reach the substrate to perform the etch and/or deposition process. In these instances, the ion suppressor helps control the concentration of ionic species in the reaction region at a level that assists the process. In embodiments the upper plate of the gas distribution assembly may include an ion suppressor.

During the etching process, the substrate may be maintained at or below about 400° C., and may be maintained at or below about 300° C., 200° C., 100° C., 80° C., 75° C., 50° C., 25° C., 10° C., 0° C., or less. The processing chamber may be maintained at or below about 100. Torr during the processes, and may be maintained at or below about 50 Torr, 25 Torr, 15 Torr, 5 Torr, 1 Torr, 0.1 Torr, etc., or between about 0.1 mTorr and about 10. Torr. By maintaining the substrate temperature at lower temperatures, such as about 10° C. or less, and maintaining the process chamber at a pressure below about 10 Torr, the amount of oxide removal can be further limited during the removal of silicon nitride.

As mentioned above, the first and second remote plasma regions may be fluidly coupled with the substrate processing region to deliver the plasma effluents to the processing region, while the processing region is plasma-free during the etching process. The substrate processing region may be described herein as plasma-free during the etch of the patterned substrate. Plasma-free does not necessarily mean the region is devoid of plasma. Ionized species and free electrons created within the plasma region may travel through pores or apertures in the showerhead or manifold, but the region in which the substrate resides is not substantially excited by the plasma power applied to the plasma region. The borders of the plasma in the chamber plasma region are hard to define and may encroach upon the substrate processing region through the apertures in the showerhead. In the case of an inductively-coupled plasma, a small amount of ionization may be effected within the substrate processing region directly.

The first and second remote plasma regions may be similar or different from one another in disclosed embodiments. The first remote plasma region may be a remote plasma unit (“RPS unit”) that is separate from the processing chamber, and that may be fluidly coupled with the chamber. The remote unit may be operated at power levels from between below or about 10 W up to above or about 10 or 15 kW in various embodiments. The power and plasma profile of the RPS unit may advantageously be tuned to the particular precursor used, such as the oxygen-containing precursor. In this way, the unit may be operated at a power level designed for a degree of dissociation of the precursor. The RPS unit processing the oxygen-containing precursor may be operated at a much higher power level as a more complete dissociation may be desired to produce O* and NO* species, for example. Accordingly, the RPS unit may be operated between up to or above about 1000 W and up to or above about 10 kW or more. The RF frequency applied in the exemplary processing system may be low RF frequencies less than about 500 kHz, high RF frequencies between about 10 MHz and about 15 MHz or microwave frequencies greater than or about 1 GHz in embodiments. As such, the RPS unit may be configured to operate at a first power level that is selected based on the composition of the first precursor.

The second remote plasma region may be located within a portion of the processing chamber that is maintained separate from the substrate processing region. For example, the second remote plasma region may be defined within the chamber and separated from the processing region with a showerhead or manifold. The second remote plasma region may be a capacitively-coupled plasma (“CCP”) formed within the region. In disclosed configurations the second remote plasma region may be located fluidly between the first remote plasma region and the processing region. The second remote plasma region may be defined by two or more electrodes that allow a plasma to be formed within the region. The fluorine-containing precursor may be delivered into the second remote plasma region, and may be delivered so as to bypass the first plasma region.

In exemplary embodiments, dissociation of the fluorine-containing precursor may be caused to a different degree than the dissociation of the oxygen-containing precursor. The fluorine-containing precursor may have weaker bond energy of the precursor molecules, or a lower degree of dissociation may be required, and thus the plasma may be formed at a different level of power within the second remote plasma region. Improved etching profiles may advantageously be effected when a fluorine-containing precursor is only partially dissociated. For example, when a fluorine-containing precursor is completely dissociated, the F* radical species may attack the chamber walls and/or the substrate detrimentally. However, when a fluorine-containing precursor, such as nitrogen trifluoride for example, is partially dissociated into NF* and NF₂* species, the chamber and substrate may be less affected while specific etching is performed. Accordingly, the CCP may be operated at a lower power level to produce only partial dissociation of the fluorine-containing precursor.

The partial dissociation may reduce the amount of F* radical species so that the fluorine-containing plasma effluents consist essentially of NF* and NF₂* species. For example, although some F* and unexcited NF₃ species may be present if the fluorine-containing precursor is nitrogen trifluoride, these species may be minimized in the effluents directed into the processing region of the chamber. For example, having the fluorine-containing plasma effluents consist essentially of NF* and NF₂* may mean that they comprise at least about 75% of the mix of species derived from the fluorine-containing precursor delivered into the processing region. Consisting essentially of NF* and NF₂* may also mean that the two species comprise at least about 80%, 85%, 90%, 95%, 99%, 99.9%, etc. or more of the mix of species derived from the fluorine-containing precursor delivered into the processing region. If other precursors are utilized that include other species than nitrogen, such as xenon difluoride, for example, the same considerations may apply such that fully dissociated F* species are minimized.

Operating a conventional CCP may degrade the chamber components, which may remove particles that may be inadvertently distributed on a substrate. Such particles may affect performance of devices formed from these substrates due to the metal particles that may provide short-circuiting across semiconductor substrates. However, the CCP of the disclosed technology may be operated at reduced or substantially reduced power because the CCP may be utilized only to partially dissociate the fluorine-containing precursor and/or maintain the oxygen-containing plasma effluents, and not to fully ionize species within the plasma region. For example, the CCP may be operated at a power level below or about 1 kW, 500 W, 250 W, 200 W, 150 W, 100 W, 50 W, 20 W, etc. or less. Moreover, the CCP may produce a flat plasma profile which may provide a uniform plasma distribution within the space. As such, a more uniform plasma may be delivered downstream to the processing region of the chamber providing improved etching profiles across a substrate.

Additionally, by providing an additional plasma source, such as the CCP source, the plasma particles produced in the RPS unit may be continued or enhanced, and the rate of recombination may be further tuned. For example, the oxygen-containing plasma effluents may be delivered into the second remote plasma region in which the CCP is formed. The plasma in this second remote plasma region may maintain the level of dissociation produced within the RPS and prevent the plasma effluents from recombining prior to entering the processing region of the chamber.

Turning to FIG. 2 is shown another flow chart of a method 200 of operations of an etch process according to disclosed embodiments. The method 200 may include one or more of the operations as previously discussed in relation to FIG. 1. The method may include flowing an oxygen-containing precursor into a first remote plasma region fluidly coupled with a second remote plasma region of a substrate processing chamber while forming a plasma in the first remote plasma region to produce oxygen-containing plasma effluents at operation 210. The first remote plasma region may be an RPS unit separate from the processing chamber as previously discussed and fluidly coupled with the processing chamber, or may be a portion of the chamber partitioned from other regions of the chamber. At operation 220, the oxygen-containing plasma effluents may be delivered into the second remote plasma region, which may be a partitioned portion of the processing chamber.

A fluorine-containing precursor may be flowed into the second remote plasma region while forming a plasma therein to produce fluorine-containing plasma effluents at operation 230. The second remote plasma region may be fluidly coupled with the substrate processing region of the chamber, and may be physically separated by an electrode at least partially defining the second remote plasma region. The oxygen-containing plasma effluents and fluorine-containing precursor/plasma effluents may be allowed to mix within the second remote plasma region to produce a more uniform mixture of species. The oxygen-containing plasma effluents and fluorine-containing plasma effluents may be delivered into the substrate processing region at operation 240. A showerhead, ion suppressor, manifold, or other divider material may be positioned between the second remote plasma region and the processing region of the chamber and may act both as an electrode for the second remote plasma region as well as a mechanism by which the precursors are delivered into the processing region. The showerhead may further mix the precursors to improve the uniformity across the profile. The plasma effluents may be used to etch the patterned substrate at operation 250.

The fluorine-containing precursor may be delivered directly into the second remote plasma region to bypass the first remote plasma region. In this way, a different plasma profile may be used for the fluorine-containing precursor than with the oxygen-containing precursor to affect the dissociation or plasma profile of the precursor. The second remote plasma region may be a CCP formed between electrodes or chamber components defining the second remote plasma region. The CCP may be operated at power levels of less than or about 200. Watts as previously discussed to provide limited or partial dissociation of the fluorine-containing precursor delivered into the second remote plasma region.

Operation of the first and second remote plasma regions may be similar or different in disclosed embodiments. For example, complete dissociation of the oxygen-containing precursor may be desired, or a greater level of dissociation, or more energy may be needed to break the bonds of the precursors. Accordingly, the first remote plasma region may be operated at a first plasma power. The second remote plasma region may be operated at a lower power to provide a limited amount of dissociation of the fluorine-containing precursor. These two power levels may be different from one another, and the second remote plasma region plasma may be operated at a power level below the level for the first remote plasma region.

Performing the methods in such a fashion may provide an additional benefit by reducing operating power of the process. Not only will the CCP operated at lower levels produce the fluorine-containing plasma effluents, but the oxygen-containing plasma effluents delivered into the second remote plasma region may interact with the fluorine-containing precursor to aid the dissociation of the precursor to produce the fluorine-containing plasma effluents. By utilizing the combined processes, nitrides such as silicon nitride may be etched faster than silicon, silicon oxide, and other materials exposed on the substrate. As would be understood, additional modifications to chamber pressure and plasma power may be used to further tune the etching processes as may be required. Advantageously, tuning these processes may be performed without the need to break vacuum conditions or move the substrate to an additional chamber. This may reduce overall processing times and save costs over conventional techniques. Additional examples of etch process parameters, chemistries, and components are disclosed in the course of describing an exemplary processing chamber and system below.

Exemplary Processing System

FIG. 3A shows a cross-sectional view of an exemplary process system section 300 with partitioned plasma generation regions within the processing chamber. During film etching, e.g., titanium nitride, tantalum nitride, tungsten, silicon, polysilicon, silicon oxide, silicon nitride, silicon oxynitride, silicon oxycarbide, etc., a process gas may be flowed into the first plasma region 315 through a gas inlet assembly 305. The plasma region 315 within the chamber may be similar to the second remote plasma region discussed previously, and may be remote from processing region 333 as discussed below. A remote plasma system (“RPS”) 301 may be included in the system, and may process a first gas which then travels through gas inlet assembly 305. RPS unit 301 may be similar to the first remote plasma region as previously discussed. The inlet assembly 305 may include two or more distinct gas supply channels where the second channel may bypass the RPS 301, as will be discussed with regard to FIGS. 3B and 3C below. Accordingly, in disclosed embodiments at least one of the precursor gases may be delivered to the processing chamber in an unexcited state, such as the fluorine-containing precursor. In another example, the first channel provided through the RPS may be used for the oxygen-containing precursor and the second channel bypassing the RPS may be used for the fluorine-containing precursor in disclosed embodiments. The oxygen-containing precursor may be excited within the RPS 301 prior to entering the first plasma region 315. Accordingly, the fluorine-containing precursor and/or the oxygen-containing precursor as discussed above, for example, may pass through RPS 301 or bypass the RPS unit in disclosed embodiments. Various other examples encompassed by this arrangement will be similarly understood.

A cooling plate 303, faceplate 317, ion suppressor 323, showerhead 325, and a substrate support 365, having a substrate 355 disposed thereon, are shown and may each be included according to disclosed embodiments. The pedestal 365 may have a heat exchange channel through which a heat exchange fluid flows to control the temperature of the substrate. This configuration may allow the substrate 355 temperature to be cooled or heated to maintain relatively low temperatures, such as between about −20° C. to about 200° C., or therebetween. The heat exchange fluid may comprise ethylene glycol and/or water. The wafer support platter of the pedestal 365, which may comprise aluminum, ceramic, or a combination thereof, may also be resistively heated to achieve relatively high temperatures, such as from up to or about 100° C. to above or about 1100° C., using an embedded resistive heater element. The heating element may be formed within the pedestal as one or more loops, and an outer portion of the heater element may run adjacent to a perimeter of the support platter, while an inner portion runs on the path of a concentric circle having a smaller radius. The wiring to the heater element may pass through the stem of the pedestal 365, which may be further configured to rotate.

The faceplate 317 may be pyramidal, conical, or of another similar structure with a narrow top portion expanding to a wide bottom portion. The faceplate 317 may additionally be flat as shown and include a plurality of through-channels used to distribute process gases.

Plasma generating gases and/or plasma excited species, depending on use of the RPS 301, may pass through a plurality of holes, shown in FIG. 3D, in faceplate 317 for a more uniform delivery into the first plasma region 315.

Exemplary configurations may include having the gas inlet assembly 305 open into a gas supply region 358 partitioned from the first plasma region 315 by faceplate 317 so that the gases/species flow through the holes in the faceplate 317 into the first plasma region 315. Structural and operational features may be selected to prevent significant backflow of plasma from the first plasma region 315 back into the supply region 358, gas inlet assembly 305, and fluid supply system 304. The structural features may include the selection of dimensions and cross-sectional geometries of the apertures in faceplate 317 to deactivate back-streaming plasma. The operational features may include maintaining a pressure difference between the gas supply region 358 and first plasma region 315 that maintains a unidirectional flow of plasma through the showerhead 325. The faceplate 317, or a conductive top portion of the chamber, and showerhead 325 are shown with an insulating ring 320 located between the features, which allows an AC potential to be applied to the faceplate 317 relative to showerhead 325 and/or ion suppressor 323, which may be electrically coupled with the showerhead 325, or similarly insulated. The insulating ring 320 may be positioned between the faceplate 317 and the showerhead 325 and/or ion suppressor 323 enabling a capacitively-coupled plasma (“CCP”) to be formed in the first plasma region. A baffle (not shown) may additionally be located in the first plasma region 315, or otherwise coupled with gas inlet assembly 305, to affect the flow of fluid into the region through gas inlet assembly 305.

The ion suppressor 323 may comprise a plate or other geometry that defines a plurality of apertures throughout the structure that are configured to suppress the migration of ionically-charged species out of the plasma excitation region 315 while allowing uncharged neutral or radical species to pass through the ion suppressor 323 into an activated gas delivery region between the suppressor and the showerhead. In disclosed embodiments, the ion suppressor 323 may comprise a perforated plate with a variety of aperture configurations. These uncharged species may include highly reactive species that are transported with less reactive carrier gas through the apertures. As noted above, the migration of ionic species through the holes may be reduced, and in some instances completely suppressed. Controlling the amount of ionic species passing through the ion suppressor 323 may provide increased control over the gas mixture brought into contact with the underlying wafer substrate, which in turn may increase control of the deposition and/or etch characteristics of the gas mixture. For example, adjustments in the ion concentration of the gas mixture can significantly alter its etch selectivity, e.g., SiNx:SiOx etch ratios, SiN:S etch ratios, etc. In alternative embodiments in which deposition is performed, it can also shift the balance of conformal-to-flowable style depositions for dielectric materials.

The plurality of holes in the ion suppressor 323 may be configured to control the passage of the activated gas, i.e., the ionic, radical, and/or neutral species, through the ion suppressor 323. For example, the aspect ratio of the holes, or the hole diameter to length, and/or the geometry of the holes may be controlled so that the flow of ionically-charged species in the activated gas passing through the ion suppressor 323 is reduced. The holes in the ion suppressor 323 may include a tapered portion that faces the plasma excitation region 315, and a cylindrical portion that faces the showerhead 325. The cylindrical portion may be shaped and dimensioned to control the flow of ionic species passing to the showerhead 325. An adjustable electrical bias may also be applied to the ion suppressor 323 as an additional means to control the flow of ionic species through the suppressor.

The ion suppression element 323 may function to reduce or eliminate the amount of ionically charged species traveling from the plasma generation region to the substrate. Uncharged neutral and radical species may still pass through the openings in the ion suppressor to react with the substrate. It should be noted that the complete elimination of ionically charged species in the reaction region surrounding the substrate may not always be the desired goal. In many instances, ionic species are required to reach the substrate to perform the etch and/or deposition process. In these instances, the ion suppressor may help to control the concentration of ionic species in the reaction region at a level that assists the process.

Showerhead 325 in combination with ion suppressor 323 may allow a plasma present in chamber plasma region 315 to avoid directly exciting gases in substrate processing region 333, while still allowing excited species to travel from chamber plasma region 315 into substrate processing region 333. In this way, the chamber may be configured to prevent the plasma from contacting a substrate 355 being etched. This may advantageously protect a variety of intricate structures and films patterned on the substrate, which may be damaged, dislocated, or otherwise warped if directly contacted by a generated plasma. Additionally, when plasma is allowed to contact the substrate or approach the substrate level, the rate at which oxide species etch may increase. Accordingly, if the exposed material is oxide, this material may be further protected by maintaining the plasma remotely from the substrate.

The processing system may further include a power supply 340 electrically coupled with the processing chamber to provide electric power to the faceplate 317, ion suppressor 323, showerhead 325, and/or pedestal 365 to generate a plasma in the first plasma region 315 or processing region 333. The power supply may be configured to deliver an adjustable amount of power to the chamber depending on the process performed. Such a configuration may allow for a tunable plasma to be used in the processes being performed. Unlike a remote plasma unit, which is often presented with on or off functionality, a tunable plasma may be configured to deliver a specific amount of power to the plasma region 315. This in turn may allow development of particular plasma characteristics such that precursors may be dissociated in specific ways to enhance the etching profiles produced by these precursors. For example, this may provide the partial dissociation of nitrogen trifluoride as explained previously.

A plasma may be ignited either in chamber plasma region 315 above showerhead 325 or substrate processing region 333 below showerhead 325. A plasma may be present in chamber plasma region 315 to produce the radical-fluorine precursors from an inflow of the fluorine-containing precursor. An AC voltage typically in the radio frequency (“RF”) range may be applied between the conductive top portion of the processing chamber, such as faceplate 317, and showerhead 325 and/or ion suppressor 323 to ignite a plasma in chamber plasma region 315 during deposition. An RF power supply may generate a high RF frequency of 13.56 MHz but may also generate other frequencies alone or in combination with the 13.56 MHz frequency.

Plasma power can be of a variety of frequencies or a combination of multiple frequencies. In the exemplary processing system the plasma may be provided by RF power delivered to faceplate 317 relative to ion suppressor 323 and/or showerhead 325. The RF power may be between about 10 Watts and about 2000 Watts, between about 100 Watts and about 2000 Watts, between about 200 Watts and about 1500 Watts, between about 0 and about 500 Watts, or between about 200 Watts and about 1000 Watts in different embodiments. The RF frequency applied in the exemplary processing system may be low RF frequencies less than about 200 kHz, high RF frequencies between about 10 MHz and about 15 MHz, or microwave frequencies greater than or about 1 GHz in different embodiments. The plasma power may be capacitively-coupled or inductively-coupled into the remote plasma region. In alternative configurations, the chamber may be configured to utilize UV or e-beam sources to excite or activate the reactive species. These capabilities may be utilized in conjunction with or in lieu of the plasma.

The top plasma region 315 may be left at low or no power when a bottom plasma in the substrate processing region 333 is turned on to, for example, cure a film or clean the interior surfaces bordering substrate processing region 333. A plasma in substrate processing region 333 may be ignited by applying an AC voltage between showerhead 355 and the pedestal 365 or bottom of the chamber. A cleaning gas may be introduced into substrate processing region 333 while the plasma is present.

A fluid, such as a precursor, for example a fluorine-containing precursor, may be flowed into the processing region 333 by embodiments of the showerhead described herein. Excited species derived from the process gas in the plasma region 315 may travel through apertures in the ion suppressor 323, and/or showerhead 325 and react with an additional precursor, such as an oxygen-containing precursor, flowing into the processing region 333 through the showerhead. Alternatively, if all precursor species are being excited in plasma region 315, no additional precursors may be flowed through the separate portion of the showerhead. Little or no plasma may be present in the processing region 333. Excited derivatives of the precursors may combine in the region above the substrate and, on occasion, on the substrate to etch structures or remove species on the substrate in disclosed applications.

Exciting the fluids in the first plasma region 315 directly, or exciting the fluids in the RPS units 301, may provide several benefits. The concentration of the excited species derived from the fluids may be increased within the processing region 333 due to the plasma in the first plasma region 315. This increase may result from the location of the plasma in the first plasma region 315. The processing region 333 may be located closer to the first plasma region 315 than the remote plasma system (RPS) unit 301, leaving less time for the excited species to leave excited states through collisions with other gas molecules, walls of the chamber, and surfaces of the showerhead.

The uniformity of the concentration of the excited species derived from the process gas may also be increased within the processing region 333. This may result from the shape of the first plasma region 315, which may be more similar to the shape of the processing region 333. Excited species created in the RPS 301 may travel greater distances to pass through apertures near the edges of the showerhead 325 relative to species that pass through apertures near the center of the showerhead 325. The greater distance may result in a reduced excitation of the excited species and, for example, may result in a slower etch rate near the edge of a substrate. Exciting the fluids in the first plasma region 315 may mitigate this variation for the fluid flowed through RPS 301, or alternatively bypassed around the RPS unit.

The processing gases may be excited in first plasma region 315 and may be passed through the showerhead 325 to the processing region 333 in the excited state. While a plasma may be generated in the processing region 333, a plasma may alternatively not be generated in the processing region. In one example, the only excitation of the processing gas or precursors may be from exciting the processing gases in RPS 301 and plasma region 315 to react with one another in the processing region 333. As previously discussed, this may be to protect the structures patterned on the substrate 355.

In addition to the fluid precursors, there may be other gases introduced at varied times for varied purposes, including carrier gases to aid delivery. A treatment gas may be introduced to remove unwanted species from the chamber walls, the substrate, the deposited film and/or the film during deposition. A treatment gas may be excited in a plasma and then used to reduce or remove residual content inside the chamber. In other disclosed embodiments the treatment gas may be used without a plasma. When the treatment gas includes water vapor, the delivery may be achieved using a mass flow meter (MFM), an injection valve, or by commercially available water vapor generators. The treatment gas may be introduced to the processing region 233, either through the RPS unit or bypassing the RPS unit, and may further be excited in the first plasma region.

FIGS. 3B and 3C show exemplary detailed views of the features of inlet assembly 305 providing the one or more precursors to the processing chamber. As shown in FIG. 3B, a first and second precursor may be delivered through separate channels in inlet assembly 305 b. For example, an oxygen-containing precursor that has been activated in RPS unit 301 may travel into inlet assembly 305 and along channel 306 a toward gas supply region 358 for delivery into plasma region 315. Channel 306 a may be an exterior channel having an annular or semi-annular shape around an interior channel 308 a that may provide a fluid path for a second precursor that may bypass RPS unit 301. For example, a fluorine-containing precursor may be delivered via channel 308 a toward plasma region 315. Channel 308 a may extend past gas supply region 358 to deliver the precursor directly into plasma region 315, or it may alternatively deliver a precursor into gas supply region 358 for initial mixing with the precursor delivered along path 306 a.

FIG. 3C illustrates an additional embodiment of the inlet assembly 305 and delivery channels 306 b and 308 b. As shown, the precursors may be separately delivered into a lower region 310 of inlet assembly 305 c where they may be allowed to initially interact before reaching gas supply region 358. For example, an oxygen-containing precursor may be delivered from RPS unit 301 into inlet assembly 305 along channel 306 b, while a fluorine-containing precursor may be delivered so as to bypass RPS unit 301 and into inlet assembly 305 along channel 308 b. Channels 306 b and 308 b may deliver the precursors into lower region 310 of inlet assembly 305 c where the precursors interact and mix prior to entering gas supply region 358. Lower region 310 may include channels or flow paths bored or formed within the walls defining the region 310 so as to improve mixing and increase turbulent flow of the fluids entering the gas supply region 358. For example, flow lines similar to rifling may be etched within the lower region 310 to cause the precursors or plasma effluents to swirl and mix prior to entering the gas supply region 358.

FIG. 3D shows a detailed view of the features 353 affecting the processing gas distribution through faceplate 317. As shown in FIGS. 3A and 3D, faceplate 317, cooling plate 303, and gas inlet assembly 305 intersect to define a gas supply region 358 into which process gases may be delivered from gas inlet 305. The gases may fill the gas supply region 358 and flow to first plasma region 315 through apertures 359 in faceplate 317. The apertures 359 may be configured to direct flow in a substantially unidirectional manner such that process gases may flow into processing region 333, but may be partially or fully prevented from backflow into the gas supply region 358 after traversing the faceplate 317.

The gas distribution assemblies such as showerhead 325 for use in the processing chamber system 300 may be referred to as dual channel showerheads (“DCSH”) and are additionally detailed in the embodiments described in FIG. 3A as well as FIG. 3E herein. The dual channel showerhead may provide for etching processes that allow for separation of etchants outside of the processing region 333 to provide limited interaction with chamber components and each other prior to being delivered into the processing region.

The showerhead 325 may comprise an upper plate 314 and a lower plate 316. The plates may be coupled with one another to define a volume 318 between the plates. The coupling of the plates may be so as to provide first fluid channels 319 through the upper and lower plates, and second fluid channels 321 through the lower plate 316. The formed channels may be configured to provide fluid access from the volume 318 through the lower plate 316 via second fluid channels 321 alone, and the first fluid channels 319 may be fluidly isolated from the volume 318 between the plates and the second fluid channels 321. The volume 318 may be fluidly accessible through a side of the gas distribution assembly 325. For example, an additional precursor that may not interact with the activated precursors previously described may be delivered to the processing region via second fluid channels 321 so that the activated precursors and the additional precursors interact only when they separately enter the processing region 333. Although the exemplary system of FIG. 3 includes a DCSH, it is understood that alternative distribution assemblies may be utilized that maintain first and second precursors fluidly isolated prior to the processing region 333. For example, a perforated plate and tubes underneath the plate may be utilized, although other configurations may operate with reduced efficiency or not provide as uniform processing as the dual-channel showerhead as described. Alternatively, when the only precursors utilized will be delivered via inlet assembly 305, and all precursors will flow from plasma region 315, a DCSH may not be necessary, and a single plate manifold or perforated plate may be utilized that further mixes the precursors while delivering them directly to the processing region 333.

In the embodiment shown, showerhead 325 may distribute via first fluid channels 319 process gases which contain plasma effluents upon excitation by a plasma in chamber plasma region 315 and/or RPS unit 301. In embodiments, the process gas introduced into the RPS 301 may include an oxygen-containing precursor and the precursors delivered into chamber plasma region 315 may contain fluorine, e.g., CF₄, NF₃ or XeF₂. The precursors may also include one or more carrier gases such as helium, argon, nitrogen (N₂), etc. Plasma effluents may include ionized or neutral derivatives of the process gas and may also be referred to herein as a radical-fluorine precursor referring to the atomic constituent of the process gas introduced.

FIG. 3E is a bottom view of a showerhead 325 and lower plate 316 for use with a processing chamber according to disclosed embodiments. Showerhead 325 corresponds with the showerhead shown in FIG. 3A. Through-holes 331, which show a view of first fluid channels 319, may have a plurality of shapes and configurations in order to control and affect the flow of precursors through the showerhead 325. Small holes 327, which show a view of second fluid channels 321, may be distributed substantially evenly over the surface of the showerhead, even amongst the through-holes 331, which may help to provide more even mixing of the precursors as they exit the showerhead than other configurations.

The chamber plasma region 315 or a region in an RPS may be referred to as a remote plasma region. In embodiments, the one or more radical precursors, e.g., a radical-fluorine precursor and/or a radical-oxygen precursor, are created in the remote plasma region and travel into the substrate processing region where they may or may not combine with additional precursors. In embodiments, the additional precursors are excited only by the radical-fluorine and radical-oxygen precursors. Plasma power may essentially be applied only to the remote plasma region in embodiments to ensure that the radical-fluorine precursor provides the dominant excitation. Nitrogen trifluoride or another fluorine-containing precursor may be flowed into chamber plasma region 215 at rates between about 25 sccm and about 500 sccm, between about 50 sccm and about 150 sccm, or between about 75 sccm and about 125 sccm in different embodiments.

Combined flow rates of precursors into the chamber may account for 0.05% to about 20% by volume of the overall gas mixture; the remainder being carrier gases. The fluorine-containing precursor may be flowed into the remote plasma region, but the plasma effluents may have the same volumetric flow ratio in embodiments. In the case of the fluorine-containing precursor, a purge or carrier gas may be first initiated into the remote plasma region before the fluorine-containing gas to stabilize the pressure within the remote plasma region.

Substrate processing region 333 can be maintained at a variety of pressures during the flow of precursors, any carrier gases, and plasma effluents into substrate processing region 333. The pressure may be maintained between about 0.1 mTorr and about 100 Torr, between about 1 Torr and about 20 Torr or between about 1 Torr and about 5 Torr in different embodiments.

Embodiments of the deposition systems may be incorporated into larger fabrication systems for producing integrated circuit chips. FIG. 4 shows one such system 400 of deposition, etching, baking, and curing chambers according to disclosed embodiments. In the figure, a pair of front opening unified pods (“FOUPs”) 402 supply substrates of a variety of sizes that are received by robotic arms 404 and placed into a low pressure holding area 406 before being placed into one of the substrate processing chambers 408 a-f. A second robotic arm 410 may be used to transport the substrate wafers from the holding area 406 to the substrate processing chambers 408 a-f and back. Each substrate processing chamber 408 a-f, can be outfitted to perform a number of substrate processing operations including the dry etch processes described herein in addition to cyclical layer deposition, atomic layer deposition, chemical vapor deposition, physical vapor deposition, etch, pre-clean, degas, orientation, and other substrate processes.

The substrate processing chambers 408 a-f may include one or more system components for depositing, annealing, curing and/or etching a dielectric film on the substrate wafer. In one configuration, two pairs of the processing chamber, e.g., 408 c-d and 408 e-f, may be used to deposit dielectric material on the substrate, and the third pair of processing chambers, e.g., 408 a-b, may be used to etch the deposited dielectric. In another configuration, all three pairs of chambers, e.g., 408 a-f, may be configured to etch a dielectric film on the substrate. Any one or more of the processes described may be carried out in chambers separated from the fabrication system shown in different embodiments.

In the preceding description, for the purposes of explanation, numerous details have been set forth in order to provide an understanding of various embodiments of the present technology. It will be apparent to one skilled in the art, however, that certain embodiments may be practiced without some of these details, or with additional details.

Having disclosed several embodiments, it will be recognized by those of skill in the art that various modifications, alternative constructions, and equivalents may be used without departing from the spirit of the disclosed embodiments. Additionally, a number of well-known processes and elements have not been described in order to avoid unnecessarily obscuring the present technology. Accordingly, the above description should not be taken as limiting the scope of the technology.

Where a range of values is provided, it is understood that each intervening value, to the smallest fraction of the unit of the lower limit, unless the context clearly dictates otherwise, between the upper and lower limits of that range is also specifically disclosed. Each smaller range between any stated value or intervening value in a stated range and any other stated or intervening value in that stated range is encompassed. The upper and lower limits of those smaller ranges may independently be included or excluded in the range, and each range where either, neither, or both limits are included in the smaller ranges is also encompassed within the technology, subject to any specifically excluded limit in the stated range. Where the stated range includes one or both of the limits, ranges excluding either or both of those included limits are also included.

As used herein and in the appended claims, the singular forms “a”, “an”, and “the” include plural references unless the context clearly dictates otherwise. Thus, for example, reference to “an operation” includes a plurality of such operations, and reference to “the plate” includes reference to one or more plates and equivalents thereof known to those skilled in the art, and so forth.

Also, the words “comprise(s)”, “comprising”, “contain(s)”, “containing”, “include(s)”, and “including”, when used in this specification and in the following claims, are intended to specify the presence of stated features, integers, components, or operations, but they do not preclude the presence or addition of one or more other features, integers, components, operations, acts, or groups. 

The invention claimed is:
 1. A method of etching a patterned substrate, the method comprising: flowing an oxygen-containing precursor into a remote plasma system (RPS) unit fluidly coupled with a substrate processing region while forming a plasma in the RPS unit to produce oxygen-containing plasma effluents; flowing an unexcited fluorine-containing precursor through an inlet assembly coupled with the RPS unit, wherein the fluorine-containing precursor bypasses the RPS unit and flows into a second remote plasma region fluidly coupled in series between the RPS unit and the substrate processing region while forming a plasma in the second remote plasma region to produce fluorine-containing plasma effluents in the second remote plasma region; flowing the oxygen-containing plasma effluents into the second remote plasma region; flowing the oxygen-containing plasma effluents and fluorine-containing plasma effluents together into the processing region; and etching a patterned substrate housed in the substrate processing region with the oxygen-containing and fluorine-containing plasma effluents.
 2. The method of claim 1, wherein at least one additional precursor is flowed with one or both of the oxygen-containing precursor or the fluorine-containing precursor, and the additional precursor is selected from the group consisting of helium, argon, nitrogen, and molecular hydrogen (H₂).
 3. The method of claim 1, wherein the fluorine-containing precursor comprises a precursor selected from the group consisting of atomic fluorine, diatomic fluorine, nitrogen trifluoride, carbon tetrafluoride, hydrogen fluoride, and xenon difluoride.
 4. The method of claim 3, wherein the fluorine-containing precursor comprises nitrogen trifluoride, and wherein the fluorine-containing plasma effluents consist essentially of NF* and NF₂* species.
 5. The method of claim 1, wherein the oxygen-containing precursor comprises a precursor selected from the group consisting of molecular oxygen, ozone, nitrous oxide, nitric oxide, and nitrogen dioxide.
 6. The method of claim 1, wherein the second remote plasma region is configured to produce a capacitively-coupled plasma.
 7. The method of claim 6, wherein the plasma in the second remote plasma region is operated at a power level of less than or about 200 Watts.
 8. The method of claim 1, wherein the fluorine-containing precursor bypasses the first plasma region.
 9. The method of claim 1, wherein the substrate temperature is maintained at or below about 50° C. during the etch process.
 10. A method of etching a patterned substrate, the method comprising: flowing an oxygen-containing precursor into a remote plasma system (RPS) unit fluidly coupled with a second remote plasma region of a substrate processing chamber while forming a plasma in the RPS unit to produce oxygen-containing plasma effluents; delivering the oxygen-containing plasma effluents into the second remote plasma region; flowing an unexcited fluorine-containing precursor through an inlet assembly coupled with the RPS unit, wherein the fluorine-containing precursor bypasses the RPS unit and flows into the second remote plasma region while forming a plasma in the second remote plasma region to produce fluorine-containing plasma effluents, wherein the second remote plasma region is fluidly coupled with a substrate processing region; delivering the oxygen-containing plasma effluents and fluorine-containing plasma effluents into the substrate processing region; and etching a patterned substrate housed in the substrate processing region with the oxygen-containing and fluorine-containing plasma effluents.
 11. The method of claim 10, wherein the plasma in the second remote plasma region is a capacitively-coupled plasma.
 12. The method of claim 11, wherein the plasma in the second remote plasma region is operated at a power level of less than or about 200 Watts.
 13. The method of claim 10, wherein the first remote plasma region is operated at a first plasma power and the second remote plasma region is operated at a second plasma power, and wherein the first plasma power and second plasma power are different from one another. 